Designing these layouts requires high precision. There is therefore sufficient resolution and a possibility of high scaling required. The layouteditor resolution can be set in a wide range, usually set to 1 nanometer.
A higher resolution is meaningless due to the atomar structure. A layouteditor of this resolution can draw elements up to 4 meters. This is sufficient as the IC/MEMS extension is typically less than 0.1 meters. MEMS/IC products are produced at multiple levels.



















Useful
Useful
Useful